Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films

We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zr-x, Ti1-x)O-3 (PZT) films prepared by a sol-gel method. Electrical characterist ics of the films were found to be improved considerably by exposure to the O-2 plasma, with enhanced remanent polarization and decreased leakage curre nt densities. Chemical bonding analysis by means of x-ray photoelectron spe ctroscopy in the Pb 4f region indicated that the intensity from the perovsk ite PZT phase increased considerably after the O-2 plasma treatment, giving rise to the improved performances of the PZT films. (C) 2000 American Inst itute of Physics. [S0003-6951(00)03107-7].