2-DIMENSIONAL SIMULATION OF COMPACT ECR PLASMA SOURCES

In the present paper, argon plasma behaviour in a compact electron cyc lotron resonance (ECR) plasma reactor is systematically studied by mea ns of 2D simulation. Using a hybrid electron fluid-article ion plasma and particle neutral model, we have obtained the plasma potential, den sity, electron temperature, ionization rate, ion kinetic energy and ve locity distributions and have found that the neutral gas pressure play s an important role in affecting all these distributions. In addition, non-uniform neutral gas depletion effects are examined by using a 2D Monte Carlo method. The depletion can obviously improve the plasma par ameter uniformity. The average ion kinetic energy impacting on the sub strate increases while the neutral gas pressure decreases. It is found that the plasma density is decreased by a factor of two and the profi le becomes more uniform if non-uniform gas density is considered. Mean while, the ionization rate is sensitive to the non-uniform neutral den sity. The ion random kinetic energies of both the parallel and the per pendicular components are obtained and the ion rotating directed movem ent is observed. The perpendicular random energy near the top of the r eactor can be much larger than that near the bottom.