Spatial resolution of nanostructural analysis by electron energy-loss spectroscopy and energy-filtered imaging

We consider several factors which determine the spatial resolution of eleme ntal analysis by core-loss spectroscopy or energy-filtered imaging. The phy sics of electron scattering, in combination with modern electron optics, al lows a resolution below 1 nm. However, the low core-loss cross sections imp ly that atomic resolution is only feasible for radiation-resistant specimen s and an electron microscope fitted with a field-emission source.