Ultraviolet light assisted oxidation has been applied for the first time to
oxidize the barriers in ferromagnetic tunnel junctions. It is shown that t
his method produces junctions of good quality with an area resistance of th
e order of 1 k Omega mu m(2) which is very attractive as the key device for
future magneto random access memories. (C) 2000 Elsevier Science B.V. All
rights reserved.