Cr. Chen et Sx. Li, Finite element analysis of characteristics of residual strains in cross-sectional specimens of strained-layer materials, J MATER SCI, 35(5), 2000, pp. 1145-1152
A procedure for modeling effects of surface stress relaxation in specimens
processed from materials with residual strains was described at first, then
the anisotropic finite element analysis was performed to study characteris
tics of strain relaxation in the cross-sectional specimens of strained-laye
r materials. By using the "element death" technique, the finite element mod
el of the specimen was separated from the finite element model of the bulk
material, and a free surface was created. As a result, effects of surface s
tress relaxation during processing specimens were conveniently modeled. The
finite element results about strain relaxation in the cross-sectional spec
imens of GexSi1-x/Si superlattice were presented. Characteristics about the
shear strain near the interface, the strain normal to the surface, and the
strain normal to the interface were studied. (C) 2000 Kluwer Academic Publ
ishers.