A strict description of the electron kinetics in rare gases near absorbingboundaries

A strict theoretical treatment of the electron kinetics in spatially distur bed steady state plasma near absorbing boundary is presented. The presence of an absorbing boundary is accompanied by a large electron density gradien t that leads to axial dependence of the electron density, electron mobility and diffusion coefficient and to strong distortion of the electron energy distribution function. An efficient method for solving axially inhomogeneos electron Boltzmann equation under the action of a steady state electric fi eld has been used. Both elastic and conservative inelastic collisions of th e electrons with gas atoms as well as elastic electron-electron collisions are taken into account. A comparison with experimental results available is reported. Investigations are performed for rare gases and a comparison of several macroscopic quantities (electron density, mean energy electron mobi lity and diffusion coefficient) is made and discussed. The applicability of the two-term Legengre polynomial expansion has been critically evaluated a nd discussed.