Makyoh topography study of the curvature and surface morphology of mismatched InGaAs/GaAs heterostructures

Authors
Nemcsics, A Riesz, F Szabo, J Horvath, ZE Gurban, S
Citation
A. Nemcsics et al., Makyoh topography study of the curvature and surface morphology of mismatched InGaAs/GaAs heterostructures, PHYS ST S-A, 177(1), 2000, pp. 231-236
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
ISSN journal
00318965 → ACNP
Volume
177
Issue
1
Year of publication
2000
Pages
231 - 236
Database
ISI
SICI code
0031-8965(200001)177:1<231:MTSOTC>2.0.ZU;2-B
Abstract
The curvature and surface morphology of lattice-mismatched InGaAs/GaAs hete roepitaxial layers are studied by Makyoh (magic-mirror) topography. The res ults are compared to X-ray topography curvature measurements and theoretica l considerations based on misfit relaxation models. The deviations suggest additional stresses, probably due to substrate effects, correlated with rou gh surface morphology.