The interaction of slow highly charged ions on surfaces (invited)

The availability of highly charged ion sources (electron cyclotron resonanc e or electron beam ion source) led in the last decade to many new scientifi c discoveries in various fields of atomic, solid state, and plasma physics. This article will review some of the most exciting results obtained in the field of the interaction of highly charged ions on surfaces in fundamental physics (hollow atom properties, mechanisms of electron captures and losse s above, below, or at surface interactions...) as well as in applied physic s (surface modifications, lithography, etc.). The deceleration and monochro matization of the ion beams delivered by the ion sources will be discussed in the framework of their use in the study of the ion surface interactions. (C) 2000 American Institute of Physics. [S0034-6748(00)57802-2].