Laser produced Ag ions for direct implantation

Authors
Woryna, E Wolowski, J Kralikova, B Krasa, J Laska, L Pfeifer, M Rohlena, K Skala, J Perina, V Boody, FP Hopfl, R Hora, H
Citation
E. Woryna et al., Laser produced Ag ions for direct implantation, REV SCI INS, 71(2), 2000, pp. 949-951
Citations number
18
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN journal
00346748 → ACNP
Volume
71
Issue
2
Year of publication
2000
Part
2
Pages
949 - 951
Database
ISI
SICI code
0034-6748(200002)71:2<949:LPAIFD>2.0.ZU;2-P
Abstract
The amount and properties of ions produced by laser ablation of Ag targets have been analyzed. The maximum ion current density j(max)=21.0 mA and maxi mum charge state Ar37+ of the ions produced by a laser power density of abo ut 1x10(14) W cm(-2) at 1.315 and 0.657 mu m on an Ag target have been dete rmined. Direct implantation of the Ag ions from the laser-produced plasma h as also been studied. An implanted ion density of 3.5x10(16) cm(-2) at a de pth of 500 nm in Al samples was determined by RBS. (C) 2000 American Instit ute of Physics. [S0034-6748(00)63302-6].