The application and status of the radio frequency driven multi-cusp ion source (invited)

The multi-cusp ion source has been operated with 2 and 13.5 MHz in either p ulse or cw mode for positive or negative ion beam production. Application o f this type of source includes spallation neutron source, ion implantation, ion beam lithography, focused ion beam systems, radioactive ion beam produ ction, and neutron generators. In order to achieve long life and reliable o peration, different antenna arrangements have been explored. It is found th at several antenna configurations can provide over 100 h of rf induction di scharge operations. (C) 2000 American Institute of Physics. [S0034-6748(00) 51602-5].