Design of a small electron cyclotron resonance ion source with partially pulsed magnetic field

Authors
Oyaizu, M Tojyo, E Jeong, SC Ishiyama, H Miyatake, H Ishida, Y Kawakami, H Katayama, I Nomura, T
Citation
M. Oyaizu et al., Design of a small electron cyclotron resonance ion source with partially pulsed magnetic field, REV SCI INS, 71(2), 2000, pp. 1113-1115
Citations number
4
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN journal
00346748 → ACNP
Volume
71
Issue
2
Year of publication
2000
Part
2
Pages
1113 - 1115
Database
ISI
SICI code
0034-6748(200002)71:2<1113:DOASEC>2.0.ZU;2-S
Abstract
A small size electron cyclotron resonance ion source to be operating in a p ulsed mode has been designed. The main static magnetic field for the confin ement is formed by permanent magnets. In addition to these magnets, two sma ll coils are introduced for controlling the magnetic field with a repetitio n rate synchronized with the pulsed operation of microwave power feeding. O ne is installed in the middle of the plasma chamber, the other is near the anode electrode. (C) 2000 American Institute of Physics. [S0034-6748(00)664 02-X].