Citation
J. Reijonen et al., Improvement of the lifetime of radio frequency antenna for plasma generation, REV SCI INS, 71(2), 2000, pp. 1134-1136
Citations number
1
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN journal
00346748
→ ACNP
Volume
71
Issue
2
Year of publication
2000
Part
2
Pages
1134 - 1136
Database
ISI
SICI code
0034-6748(200002)71:2<1134:IOTLOR>2.0.ZU;2-0
Abstract
At Lawrence Berkeley National Laboratory different antenna protection schem
es have been investigated for the radio frequency-driven multicusp ion sour
ce. It was found that the antenna lifetime can be greatly enhanced by an ad
ditional shielding, which consists of porcelain, quartz or boron nitride. D
ifferent antenna configurations and their influence on the plasma generatio
n will be discussed. Antenna life time greater than 500 hours continuous wa
ve operation has been demonstrated in hydrogen plasma using a novel quartz
antenna design. [S0034-6748(00)54202-6].