Electron cyclotron resonance light source assembly - A vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma

A vacuum-ultraviolet radiation source based on an electron cyclotron resona nce plasma was developed. Electron cyclotron resonance light source assembl y (ELISA) is a 10 GHz monomode source of compact design featuring a tunable cavity and permanent magnets which can be axially positioned. The radiatio n emission of the source can be detected simultaneously in the vacuum-ultra violet spectral range via a toroidal grating monochromator and in the x-ray spectral range via a Si(Li) detector. Spectroscopic investigations of a kr ypton and a neon plasma in the 9-27 nm spectral range show that ELISA produ ces complex line spectra of highly ionized atoms by applying only 12 W micr owave power. (C) 2000 American Institute of Physics. [S0034-6748(00)54602-4 ].