Depth profiling of optical absorption in thin films via the mirage effect and a new inverse scattering theory. Part II: Experimental reconstructions on well-characterized materials
Sw. Fu et Jf. Power, Depth profiling of optical absorption in thin films via the mirage effect and a new inverse scattering theory. Part II: Experimental reconstructions on well-characterized materials, APPL SPECTR, 54(1), 2000, pp. 127-137
Mirage effect spectrometry is experimentally evaluated in this work as a te
chnique of optical depth profiling in thin films where no prior information
is available about the sample properties. An apparatus suitable for perfor
ming quantitative measurements is described. High-precision experimental al
ignment procedures are introduced along with a new method for precise optic
al correction of the detector signal for experimental frequency response no
nuniformities. Reconstructions were made of the heat source density and abs
orption coefficient depth profile in materials with known depth dependence.
These included samples approximating weighted delta function arrays, and d
epth-continuous media known to obey Beer's law to a good approximation. The
properties of these samples were examined independently by using a techniq
ue of depth-sensitive light microscopy. Mirage effect depth profiles recons
tructed on samples containing discrete absorbers were effectively regulariz
ation limited, indicating that resolution is limited by random error in the
data rather than experimental bias. Depth profiles obtained in continuousl
y absorbing media show a good agreement with those obtained by reference me
thods.