Al-0.028 at.% Ga alloy, either just electropolished or subsequently anodize
d, was examined for gallium enrichment in the alloy using Rutherford bucksc
attering spectroscopy. Unlike with alkaline etching, no significant enrichm
ent of gallium, namely <5 x 10(17) Ga atoms m(-2), was developed by electro
polishing in perchloric acid:ethanol, which is suggested to be associated w
ith activation of the alloy in the acid bath. In contrast, during anodizing
in ammonium pentaborate electrolyte, gallium is accumulated to 400 V at 50
A m(-2) progressively in a thin alloy layer beneath the anodic film, with
initial formation of essentially gallium-free alumina. The number of galliu
m atoms accumulated in the enriched alloy layer per. unit area of alloy/fil
m interface increases linearly with the anodizing voltage at 1.0 x 10(16) G
a atoms m(-2) V-1. At anodizing voltages above similar to 150 V, the films
become detached locally from the alloy. The detachment evidently coincides
with the formation of fine voids at the alloy/film interface, observed in t
he transmission electron microscope, possibly initiated by localized oxidat
ion of gallium-rich regions of alloy. (C) 2000 Elsevier Science Ltd, All ri
ghts reserved.