Plasmachemical deposition of SiO2 thin films from oilgoalkylhydrocyclosiloxanes

Authors
Martynova, TN Voronkov, MG
Citation
Tn. Martynova et Mg. Voronkov, Plasmachemical deposition of SiO2 thin films from oilgoalkylhydrocyclosiloxanes, DOKL AKAD N, 367(4), 1999, pp. 513-516
Citations number
7
Categorie Soggetti
Multidisciplinary
Journal title
DOKLADY AKADEMII NAUK
ISSN journal
08695652 → ACNP
Volume
367
Issue
4
Year of publication
1999
Pages
513 - 516
Database
ISI
SICI code
0869-5652(199908)367:4<513:PDOSTF>2.0.ZU;2-N