Frequency-dependent series resistance of monolithic spiral inductors

We present the analysis of the frequency dependent inductor series resistan ce (R-s). The high-frequency effects on series resistance have been confirm ed with measured and simulated data of inductors having different geometric and process parameters in order to predict and optimize the high-performan ce inductors used in radio frequency (RF) integrated circuits (IC's). The r esults show that the magnetic field effect seems to be a dominant factor in determining the R-s in high-frequency region.