Analysis of Ar visible spectra in inductively coupled plasma

Spectroscopic measurement has been carried out for identification of chemic al species in inductively coupled Ar plasma, In addition, the excitation te mperature has been calculated for each condition by the Boltzmann plot, usi ng relative intensities of spectra for neutral Ar, Only ionized Ar+ lines w ere observed, at 133 Pa in the low pressure range, while only neutral Ar li nes were observed! at 8.0 x 10(3) Pa in high pressure range. At 667 Pa and 8.0 x 10(3) Pa in high pressure range, the plasma is reached an almost loca l thermodynamic equilibrium (LTE) and excitation temperatures for these pre ssure conditions could be calculated, The results indicated temperatures we re about 7800 K and 6400 K, respectively.