Epitaxial CeO2 buffer layers and YBa2Cu3O7-delta thin films have been
grown in situ on (1102BAR) sapphire by electron beam evaporation. Buff
er layers of only 20 nm thickness inhibit interdiffusion between YBa2C
u3O7-delta and Al2O3 as determined by depth profiling using x-ray phot
oelectron spectroscopy. The layers show smooth surfaces and narrow int
erfaces. High lattice perfection of the CeO2 layer has been shown by x
-ray diffraction. The first time Laue oscillations up to ninth order h
ave been observed in thin CeO2 buffer layers. YBa2Cu3O7-delta films gr
own on these buffer layers reveal T(c) = 88 +/- 0.5 K, rho(300 K) = 38
0 muOMEGAcm, and j(c)(77 K, 0T) = 1.3 x 10(6) A/cm2.