Determination of the regions of layer and island film growth at vacuum condensation

The island film growth kinetics at the initial stages has been studied to d etermine the reasons for layer-to-pseudolayer growth transition in thin fil ms caused by the change of the condensation conditions. The process is math ematically described by a set of differential rate equations for the format ion of islands of different size, The change of diffusion activation energy , condensation temperature and deposition rate induces the island-to-layer growth transition. The regions of the island and layer growth in the "tempe rature - condensation rate" coordinates have been found.