A large microwave plasma reactor was used for the deposition of plasma-poly
merized coating from hexamethyldisiloxane (HMDSO)/oxygen(O-2) mixtures on i
ron samples. The plasma was characterized by optical emission spectroscopy
as a function of the HMDSO to oxygen ratio. Infrared spectroscopy was used
to investigate the coating structure, The variation of the HMDSO content in
the feed provides a large wide of coatings, from. silica (HMDSO content: 2
0%) to polymer (HMDSO content >80%). Electrochemical impedance spectroscopy
was used to predict corrosion protective properties of the coating. Differ
ent HMDSO/O-2 ratios in the mixture provide varying degree of corrosion pro
tection and the best protection was obtained for the plasma-polymerized coa
ting from HMDSO 80% content precursor. (C) 2000 Elsevier Science S.A. All r
ights reserved.