IN-SITU DEPOSITION OF HIGH-TC MATERIALS USING VACUUM-ARC ABLATION WITH MACROPARTICLE FILTER

Authors
SLOGGETT G MCKENZIE DR COCKAYNE DJH SMITH GB JENKINS B FOLEY CP TAKANO Y STUDER AJ HAUB JG ORR BJ
Citation
G. Sloggett et al., IN-SITU DEPOSITION OF HIGH-TC MATERIALS USING VACUUM-ARC ABLATION WITH MACROPARTICLE FILTER, Physica. B, Condensed matter, 194, 1994, pp. 2353-2354
Citations number
3
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica. B, Condensed matter → ACNP
ISSN journal
09214526
Volume
194
Year of publication
1994
Part
2
Pages
2353 - 2354
Database
ISI
SICI code
0921-4526(1994)194:<2353:IDOHMU>2.0.ZU;2-Y
Abstract
Vacuum arc ablation is shown to be a new deposition technique for depo siting YBCO thin films in situ with zero resistance below 85 K. A high deposition rate was achieved from small specimens. The size of macrop articles is larger than for laser ablation for the same target materia l, but a curved solenoidal filter was used to reduce the macroparticle content.