We have templated Cu(100) surfaces with self-assembled arrays of atomic nit
rogen islands and then used these islands as masks for Co growth. This meth
od of nanolithography enables the creation of Co dot arrays with dot densit
ies 4 x 10(12) cm(-2) (27 teradots/in.(2)). Adjusting the nitrogen coverage
also enabled the creation of arrays of Co lines spaced 10 nm (0.01 mu m) a
part. (C) 2000 American Institute of Physics. [S0003-6951(00)04309-6].