B. Legrand et D. Stievenard, Atomic force microscope tip-surface behavior under continuous bias or pulsed voltages in noncontact mode, APPL PHYS L, 76(8), 2000, pp. 1018-1020
The atomic force microscope is now widely used to oxidize a silicon surface
with a continuous bias or pulsed voltages applied between the tip and the
silicon surface. The aim of this letter is to study the induced electrostat
ic effect on the cantilever oscillation in noncontact mode when pulsed volt
ages are used for nanooxidation. Depending on the relative amplitudes betwe
en electrostatic and mechanical excitations, and also on the phase between
the pulsed voltages and the mechanical excitation, the cantilever response
can dramatically vary. We focus on the details of controlling the feedback
loop and exposure conditions in noncontact mode. (C) 2000 American Institut
e of Physics. [S0003-6951(00)01308-5].