Cantilever technique for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation

A new method for the preparation of cross sections, for transmission electr on microscopy using a focused ion beam workstation is presented. The new te chnique consists of micromachining. a freestanding cantilever into which a membrane for transmission electron microscopy is milled. An advantage of th is approach over the trench and lift out focused ion beam procedures for th e preparation of cross sections for transmission electron microscopy is tha t the. resulting cross. sections can be both tilted through large angles (45 degrees) without the electron path becoming obstructed and they can be r eturned to the focused ion beam system for further thinning. (C) 2000 Ameri can Vacuum Society.