Compensation effect during water desorption from siloxane-based spin-on dielectric thin films

It is the aim of this report to show experimental evidence for the compensa tion effect during water desorption from siloxane-based spin-on dielectrics . A single linear relationship was obtained between the activation entropy Delta S-# and the activation enthalpy Delta H-# for the elementary water de sorption components in the degassing spectra for siloxane-based dielectric thin films. From this observation, an isokinetic temperature was derived at which all desorption rates become equal. It is argued that this temperatur e can be considered as a fundamental materials characteristic, governing th e thermal stability of the dielectric thin film. (C) 2000 American Vacuum S ociety. [S0734-211X(00)3401-6].