Comparison of two-dimensional carrier profiles in metal-oxide-semiconductor field-effect transistor structures obtained with scanning spreading resistance microscopy and inverse modeling

Scanning spreading resistance microscopy (SSRM) is used to determine the co mplete two-dimensional carrier profile of fully processed 0.29 mu m p- and n-type metal-oxidesemiconductor field-effect transistors with various sourc e/drain implants. A comparison is made between the quantified profiles dete rmined using SSRM and the profiles extracted from the electrical device cha racteristics using an inverse modeling technique. This comparison includes source/drain and well implants, epilayers, and field implants. The data are compared in terms of depth precision and carrier-concentration accuracy an d show a good agreement. This article also addresses the limitations and po ssible artifacts of both methods. (C) 2000 American Vacuum Society. [S0734- 211X(00)10501-3].