Hard optical coating films based on SiO2/TiO2/organically modified silane (
ORMOSIL) were obtained by the sol-gel technique. Tetraethoxysilane [TEOS, S
i(OC2H5)(4)], gamma-Glycidoxypropyltrimethoxysilane [GLYMO, (CH2OCH)CH2O-(C
H2)(3)Si(OCH3)(3)], and tetrapropylorthotitanate [TIP, Ti(O-i-C3H7)(4)] wer
e used as precursors for the SiO2/TiO2/ORMOSIL coatings. The hardness and Y
oung's modulus of the coatings were characterized and found to depend on th
e heat-treatment temperature. Hardness as high as 10 GPa was achieved at a
heat-treatment temperature of 1000 degrees C for 20 min. Thermal gravimetri
c analysis (TGA), scanning electron microscopy (SEM), and Raman spectroscop
y were also used to investigate the structural properties of the coating. I
t is proposed that the high hardness of the coating film is related to the
carbon and titanium content in the film. (C) 2000 Elsevier Science B.V. All
rights reserved.