Self-aligned photoresist patterning for integrated optics

Authors
Geraghty, DF Ayras, P Jabbour, GE Honkanen, S Peyghambarian, N
Citation
Df. Geraghty et al., Self-aligned photoresist patterning for integrated optics, OPT ENG, 39(2), 2000, pp. 575-576
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICAL ENGINEERING
ISSN journal
00913286 → ACNP
Volume
39
Issue
2
Year of publication
2000
Pages
575 - 576
Database
ISI
SICI code
0091-3286(200002)39:2<575:SPPFIO>2.0.ZU;2-N