In situ X-ray multilayer reflectometry based on the energy dispersive method

We demonstrate the capacities of the energy dispersive method (EDM) by meas uring in situ and during deposition the reflectivity of 5 and 9.2 nm period Mo/Si multilayers in the 5 to 40 keV energy range. The required X-ray cont inuum spectrum was emitted by an X-ray tube with an Ag anode and the reflec ted spectra were analyzed in energy by a Si(Li) detector. Kapton windows al low the source and the detector to be set outside the deposition chamber. T he absolute intensity and FWHM of several Bragg peaks orders are measured a fter deposition of successive periods. The EDM method is compared with two others established in situ angular dispersive methods (ADM). (C) 2000 Elsev ier Science B.V. All rights reserved.