Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron

Energy distributions of nitrogen atoms (N) in a hollow-cathode planar sputt ering magnetron were obtained by use of optical emission spectroscopy. A ch aracteristic line, N I 8216.3 Angstrom, well separated from molecular nitro gen emission bands, was identified. Jansson's nonlinear spectral deconvolut ion method, refined by minimization of chi(w)(2), was used to obtain the op timal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM computer code results, it is proposed that the energetic N's are generated from N-2(+) ions after the se ions are accelerated through the sheath and dissociatively reflect from the cathode.