ON THE QUANTIFICATION OF SNMS ANALYSES OF SILICATE-GLASSES AND OXIDE COATINGS

The new high frequency mode (HFM) of the SNMS apparatus, type INA3. is especially suited for the analysis of electrically non-conducting mat erials. Experiments were carried out with glasses and various oxide co atings in order to demonstrate the quantifiability of HFM analyses wit h respect to these materials, The influence of the composition of the samples and the selected parameters of the HFM, such as accelerating v oltage, duty cycle and frequency, on the quantifiability of the measur ements are discussed. It is shown that quantification is possible with in certain limits of composition.