Growth of SrTiO3 thin films on LaAlO3(001) substrates; the influence of growth temperature on composition, orientation, and surface morphology

Authors
Wang, X Olafsson, S Sandstrom, P Helmersson, U
Citation
X. Wang et al., Growth of SrTiO3 thin films on LaAlO3(001) substrates; the influence of growth temperature on composition, orientation, and surface morphology, THIN SOL FI, 360(1-2), 2000, pp. 181-186
Citations number
20
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
360
Issue
1-2
Year of publication
2000
Pages
181 - 186
Database
ISI
SICI code
0040-6090(20000201)360:1-2<181:GOSTFO>2.0.ZU;2-R
Abstract
SrTiO3 films have been grown on LaAlO3(001) single crystal substrates using rf-sputtering, The substrates were held at temperatures ranging from 100 t o 850 degrees C. For growth temperatures as low as 350 degrees C epitaxial growth is observed. Below 350 degrees C the films are polycrystalline and t hree different orientations (100), (110), and(111) can be observed using X- ray diffraction. Atomic force microscopy shows that films deposited at temp eratures below 350 degrees C and above 650 degrees C are smooth while the s urfaces of the films made at intermediate temperatures are rough and facete d. As growth temperatures decrease below 250 degrees C, the films show decr easing amount of Sr. (C) 2000 Elsevier Science S.A. All rights reserved.