The gas sensitivity of a metal-insulator-semiconductor field-effect-transistor based on Langmuir-Blodgett films of a new asymmetrically substituted phthalocyanine
Wp. Hu et al., The gas sensitivity of a metal-insulator-semiconductor field-effect-transistor based on Langmuir-Blodgett films of a new asymmetrically substituted phthalocyanine, THIN SOL FI, 360(1-2), 2000, pp. 256-260
Langmuir-Blodgett (LB) films of an amino-tri-tert-butyl-phthalocyanine (AmB
uPc) were fabricated as the semiconductor thin layer for a metal-insulator-
semiconductor field-effect-transistor (MISFET). The gas sensitivity of the
low-conducting LB films MISFET was measured in a NO2 atmosphere at differen
t concentration. The results showed that the gas concentration and the drai
n-source current of the AmBuPc sensor satisfy Langmuir adsorption isotherm.
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