Study of diamond-like carbon films on LiNbO3

Diamond-like carbon (DLC) films have been successfully deposited on Y-cut L iNbO3 substrates using the plasma enhanced CVD technique. A thin interlayer of SiC between the DLC films and the LiNbO3 is necessary to ensure a good adhesion of the DLC films to the LiNbO3 substrate. The physical properties and structural network of the DLC films have been investigated in detail. I t is observed that the film hardness is increased with increasing the film thickness, as is the adhesion of the DLC films to the LiNbO3 substrates. Th e effect of accelerating surface acoustic wave by the DLC films has been co nfirmed. (C) 2000 Elsevier Science S.A. All rights reserved.