CORRECTION OF STM TIP CONVOLUTION EFFECTS IN PARTICLE-SIZE AND DISTANCE DETERMINATION OF METAL-C-H FILMS

Metal containing amorphous hydrocarbon films consist of nanometer size metallic particles in a hydrogen-carbon matrix. Scanning tunneling mi croscopy (STM) of Au and Pt containing amorphous C:H-films was perform ed in order to determine particle size- and distance distributions. To correct tip convolution effects, which lead to apparent particle enla rgement and particle hiding (1) a method is presented which allows off -line STM tip radius determination by statistical analysis of apparent particle radii and thereby a correct particle radii determination. (2 ) A simple Monte Carlo model is proposed to compute fractions of hidde n particles and their influence on particle distance distributions. Re sults of these evaluations are compared with results from small angle X-ray scattering (SAXS), transmission electron microscopy (TEM) and X- ray diffraction (XRD).