UV and VUV excilamps excited by glow, barrier and capacitive discharges

An investigation was made into the characteristics of XeCl (lambda similar to 308 nm), KrCl (lambda similar to 222 nm) and XeI (lambda similar to 253 nm) capacitive HF discharge and glow discharge excilamps. High fluorescence efficiency of the exciplex molecules has been obtained from excilamps with simple design under capacitive HF discharge excitation. A fluorescence eff iciency with respect to the electrical power deposition of up to similar to 12% has been measured. The study of XeCl, KrCl and XeI excilamps has shown that it is possible to create sealed-off excilamps with gas mixture lifeti mes of over 1000 hours.