Laser micro-machining of small objects for high-energy laser experiments

Targets for high-energy laser experiments are polymer or metal objects of s mall dimensions. These objects need high-precision processes (typical sizes of a few hundred micrometers with micrometer accuracy). In this paper, som e targets for high-energy laser experiments obtained by picosecond Q-switch ed Nd:YAG laser and KrF excimer laser micro-machining are presented. All of the targets use an original process. Activities include cutting, drilling, and marking elements. A summary of targets made using laser processes will be presented.