Hot-electron flux observation in large-area microwave sustained plasmas

Authors
Kudela, J Terebessy, T Kando, M
Citation
J. Kudela et al., Hot-electron flux observation in large-area microwave sustained plasmas, APPL PHYS L, 76(10), 2000, pp. 1249-1251
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
76
Issue
10
Year of publication
2000
Pages
1249 - 1251
Database
ISI
SICI code
0003-6951(20000306)76:10<1249:HFOILM>2.0.ZU;2-Y
Abstract
Flux of hot electrons directed away from the waveguiding plasma-dielectric interface was experimentally observed in large-area microwave discharges. T he energy of these electrons attains values of some 60 eV, and they are bel ieved to be originating from the resonantly-enhanced electric field region localized near the dielectric. The phenomenon appears to play a significant role in discharge heating mechanism, which is demonstrated by plasma param eter profiles. (C) 2000 American Institute of Physics. [S0003-6951(00)03010 -2].