Xb. Xiang et al., OPTICAL AND STRUCTURAL-PROPERTIES OF ANODIZED ALXGA1-XAS LAYERS, Materials science & engineering. B, Solid-state materials for advanced technology, 44(1-3), 1997, pp. 121-124
The optical and structural properties of anodized AlxGa1-xAs films wer
e investigated by using optical reflectance, X-ray photoemission and A
uger electron spectroscopy (XPS and AES). II was found that the anodiz
ation process occurs progressively from the surface to the bulk of Alx
Ga1-xAs and the formed oxidation film comprises mainly oxides of Al an
d Ga together with a relatively small amount of As. The refractive ind
exes of the anodized Al0.8Ga0.2As film and Al0.8Ga0.2As film itself we
re deduced to be about 1.80 and 3.25, respectively, indicating that th
e anodization film is desirable for anti-reflection coating of the sur
face of AlxGa1-xAs/GaAs solar cells. (C) 1997 Elsevier Science S.A.