LOCAL EXPRESS SCANNING CHARACTERIZATION OF CRYSTAL PARAMETERS OF A SEMICONDUCTOR SURFACE AND BULK SIMULTANEOUSLY BY MEANS OF 2ND-HARMONIC GENERATION

Authors
BALANYUK VV DVORETSKY SA FEDOROV AA LIBERMAN VI MUSHER SL RUBENCHIK AM RYABCHENKO VE STUPAK MF SYSKIN VS
Citation
Vv. Balanyuk et al., LOCAL EXPRESS SCANNING CHARACTERIZATION OF CRYSTAL PARAMETERS OF A SEMICONDUCTOR SURFACE AND BULK SIMULTANEOUSLY BY MEANS OF 2ND-HARMONIC GENERATION, Materials science & engineering. B, Solid-state materials for advanced technology, 44(1-3), 1997, pp. 168-172
Citations number
7
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
44
Issue
1-3
Year of publication
1997
Pages
168 - 172
Database
ISI
SICI code
0921-5107(1997)44:1-3<168:LESCOC>2.0.ZU;2-H
Abstract
Generation of transmitted second harmonic radiation has been shown to be a fast and convenient technique for the determination of local crys tal quality of semiconductor plates and films. This 'transmission sche me' makes it possible to get precise information about the surface lay er of a sample. A computer controlled unit based on a YAP:Nd laser is described. Local orientation could be measured easily with a spatial r esolution of up to 50 mu m over 20 s. Scanning of a 40 x 40 mm surface map takes about 10 min. (C) 1997 Elsevier Science S.A.