K. Streubel et al., FABRICATION OF INP AIR-GAP DISTRIBUTED BRAGG REFLECTORS AND MICRO-CAVITIES/, Materials science & engineering. B, Solid-state materials for advanced technology, 44(1-3), 1997, pp. 364-367
High reflective Bragg reflectors based on suspended InP-layers were fa
bricated by selective wet etching. Areas as large as 15 x 26 mu m(2) c
ould be realized. Two three-period mirrors were employed in a cavity w
ith a 1.3 mu m GaInAsP active layer. The spectral reflectivity of the
structure exhibits a Fabry Perot resonance at 1.32 mu m. When excited
with a Nd-YAG laser, the structure generates a narrow emission at the
same wavelength and a linewith of less than or equal to 2.5 nm. (C) 19
97 Published by Elsevier Science S.A.