FABRICATION OF INP AIR-GAP DISTRIBUTED BRAGG REFLECTORS AND MICRO-CAVITIES/

Citation
K. Streubel et al., FABRICATION OF INP AIR-GAP DISTRIBUTED BRAGG REFLECTORS AND MICRO-CAVITIES/, Materials science & engineering. B, Solid-state materials for advanced technology, 44(1-3), 1997, pp. 364-367
Citations number
9
Categorie Soggetti
Material Science","Physics, Condensed Matter
ISSN journal
09215107
Volume
44
Issue
1-3
Year of publication
1997
Pages
364 - 367
Database
ISI
SICI code
0921-5107(1997)44:1-3<364:FOIADB>2.0.ZU;2-P
Abstract
High reflective Bragg reflectors based on suspended InP-layers were fa bricated by selective wet etching. Areas as large as 15 x 26 mu m(2) c ould be realized. Two three-period mirrors were employed in a cavity w ith a 1.3 mu m GaInAsP active layer. The spectral reflectivity of the structure exhibits a Fabry Perot resonance at 1.32 mu m. When excited with a Nd-YAG laser, the structure generates a narrow emission at the same wavelength and a linewith of less than or equal to 2.5 nm. (C) 19 97 Published by Elsevier Science S.A.