The anisotropy of the oxygen diffusion in the high-T-c-superconductor Bi2Sr
2CaCu2O8+delta was investigated using off-c-axis prepared thin films. High-
quality oriented films with thickness 1000 Angstrom and c-axis inclined by
a tilt angle a with respect to the normal of the film surface were grown up
to alpha = 15 degrees. Oxygen diffusion following a small change of the am
bient oxygen partial pressure in the temperature range 200-400 degrees C wa
s monitored by in situ resistance measurements. Diffusion times according t
o an activated process tau(-1) = tau(0)(-1) exp[-E/k(B)T] were found, with
E = 0.6 eV and tau(0) = tau(0)(alpha) Becoming smaller with increasing tilt
angle. A comparison of the experimental tau(0)(alpha) with a calculation o
f tau(0) for an ideal monocrystalline film suggests that as-grown films con
sist of crystalline grains with lateral dimensions similar to 1 mu m.