Behavioral modeling of microelectromechanical systems (MEMS) with statistical performance-variability reduction and sensitivity analysis

An approach to behavioral modeling of microelectromechanical systems (MEMS) is presented emphasizing robust design that minimizes the effects of devic e parametric variability on overall performance. Using a novel application of Taguchi experimental design and statistical process-control methods, sta tistical: performance-variability reduction and parametric sensitivity anal ysis are studied. Taguchi performance-variability reduction and-parametric sensitivity analyses introduce design-for-manufacturing into behavioral mod eling. An example is given for:the robust behavioral modeling of a microele ctromechanical laterally driven electrostatic-comb microresonator, Applicat ions of the behavioral-modeling approach to high-performance design, manufa cturing yield optimization, and operational reliability assessment are also given.