Soft X-ray spectroscopy from image sequences with sub-100 nm spatial resolution

A method is described whereby a sequence of X-ray images at closely spaced photon energies is acquired using a Scanning transmission X-ray microscope, and aligned. Near-edge absorption spectra can then be obtained both from l arge, irregular regions, and from regions as small as the spatial resolutio n of the microscope (about 40 nm in the examples shown here), The use of th e technique is illustrated in examination of a layered polymer film, a micr ometeorite section, and an interplanetary dust particle section.