The model of McRae et al. is used to investigate the effect of laser fluenc
e and collisions in the dissociation of vibrationally excited Si2F6 The par
ameters of the model are obtained and their dependence on laser fluence is
discussed. Vibrational energy pooling mechanism dominates over quenching of
vibrational excitation in homogeneous (Si2F6-Si2F6) collisions. Heterogene
ous collisions between Si2F6 parent molecule and SiF4 as dissociation produ
ct are found to hinder dissociation for low laser fluence and to enhance it
, as fluence increases. (C) 2000 Elsevier Science S.A. All rights reserved.