Dynamical simulation of LACBED patterns in cross-sectioned heterostructures

The Large Angle Convergent Beam Electron Diffraction (LACBED) technique has been applied to determination of the tetragonal mismatch in coherent Si/Si 1-xGex/Si heterostructures. Two-dimensional (2D) dynamical simulation of th e LACBED patterns has been performed and compared with the corresponding ex perimental ones. A good agreement is found in the whole simulated area, par ticularly as regards the splining of the Bragg contours, due to the strain field present in the TEM cross-sections. (C) 2000 Elsevier Science Ltd. All rights reserved.