Citation
J. Gottert et al., ANKA - a synchrotron light source for X-ray based micromachining, MICROSYST T, 6(3), 2000, pp. 113-116
Citations number
8
Categorie Soggetti
Instrumentation & Measurement
Journal title
MICROSYSTEM TECHNOLOGIES
ISSN journal
09467076
→ ACNP
Volume
6
Issue
3
Year of publication
2000
Pages
113 - 116
Database
ISI
SICI code
0946-7076(200002)6:3<113:A-ASLS>2.0.ZU;2-0
Abstract
ANKA (Angstromquelle Karlsruhe) is a state-of-the-art synchrotron radiation
facility currently under construction at the Forschungszentrum Karlsruhe.
Based on a 2.5 GeV electron storage ring it delivers photons from the infra
red through to the hard X-rays. Operation of ANKA is scheduled for Septembe
r 2000. Synchrotron radiation related services in the fields of microfabric
ation and analytical services will be available from ANKA GmbH to industria
l clients and scientific users.