A symmetric illumination device for scanning tunneling optical microscopy i
s proposed. This new configuration limits the spurious effects due to non i
sotropic illumination, coherence and polarization effects. Some specific te
st objects have been fabricated in order to estimate the validity of such a
microscope. Experimental results exhibiting highly confined features for a
15 nm chromium layer with 130-150 nm diameter holes have been obtained. (C
) 2000 Published by Elsevier Science B.V. All rights reserved.