Surface potential mapping: comparison of the vibrating capacitor and the SPV method

Surface potential maps are very important for characterisation of insulator covered and bare semiconductor surfaces. Contactless methods use capacitiv e coupling. Vibration (vibrating capacitor) and light (SPV, surface photo v oltage method) are used for the surface excitation. Both methods give infor mation about the surface potential, and are sensitive to the surface charge , too. This article discusses the differences and similarities between the methods, concerning theory, application and evaluation of the results. Seve ral surface potential maps an presented and evaluated too. (C) 2000 Elsevie r Science Ltd. All rights reserved.